Article
JOURNAL OF APPLIED PHYSICS  (2018)

The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma=> A study by a nonlinear global model

Saikia, P; Bhuyan, H; Escalona, M; Favre, M; Bora, B; Kakati, M; Wyndham, E; Rawat, RS; Schulze, J

Más información

Título de la Revista: JOURNAL OF APPLIED PHYSICS
Volumen: 123
Asunto: 18
Editorial: AMER INST PHYSICS
Fecha de publicación: 2018
DOI/URL:

10.1063/1.5023884