Abstract

The performance of two types of 1 x 1 cm(2) photodiocle position sensitive detectors (PSDs) based on resistive charge division was evaluated for their use in Rutherford Backscattering/Channeling (RBS/C) experiments in blocking geometry. Their energy resolution was first determined for similar to 5.5 MeV alpha particles from a radioactive sources, and values of full width half maximum (FWHM) of 22 keV and 33 keV were achieved using a shaping time constant of tau = 2.0 ns. Additional tests were performed using backscattered He-4 particles from the 2.0 MeV beam of a Van de Graaff accelerator. While the 22 keV FWHM detector failed after exposure to less than 5 x 10(6) cm(-2) He-4 particles, the other did not show any noticeable deterioration due to radiation damage for a fluence of 4 x 10(8) cm(2). For this type of PSD position resolution (tau = 0.5 mu s) standard deviations of Delta L = 0072 mm at similar to 5.5 MeV and Delta L = 0247 mm at 1.1 MeV were achieved. RES/Channeling experiments using PSD were performed on several crystalline samples, showing that this setup seems suitable for lattice location studies, particularly for heavy ions implantation (D greater than or similar to 10(15) at/cm(2)) on light substrates like Si, SiC, and AIN. (C) 2014 Elsevier B.V. All rights reserved