Abstract

Amorphous barium titanate films were flash evaporated on silicon and studied with X-ray photoelectron spectroscopy. After water adsorption, the surface oxygen 1s photoelectron peak reveals the presence of hydroxyl groups. A thermal desorption experiment on a similar thin film evaporated on rhenium shows one peak of water partial pressure at about 480 K, which decreases after repeated cycles of adsorption and thermal desorption, suggesting that oxygen vacancies are filled up during desorption. © 1997 Elsevier Science Ltd. All rights reserved.