Article ISI SCOPUS
Applied Physics Letters  (2012)

Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma

Bora, B; Bhuyan, H; Favre, M.; Wyndham E.; Chuaqui, H

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Título según WOS: Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
Título según SCOPUS: Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
Título de la Revista: Applied Physics Letters
Volumen: 100
Número: 9
Editorial: American Institute of Physics Inc.
Fecha de publicación: 2012
Idioma: English
URL: http://www.scopus.com/inward/record.url?eid=2-s2.0-84857959649&partnerID=40&md5=68357ce44e9483336deb7233592358ae
DOI:

10.1063/1.3690870
Notas: ISI, SCOPUS