Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (vol 24, 054002, 2015)
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Título según WOS: | Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (vol 24, 054002, 2015) |
Título según SCOPUS: | Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 (054002)) |
Título de la Revista: | Plasma Sources Science and Technology |
Volumen: | 24 |
Número: | 6 |
Editorial: | Institute of Physics Publishing |
Fecha de publicación: | 2015 |
Idioma: | English |
DOI: |
10.1088/0963-0252/24/6/069501 |
Notas: | ISI, SCOPUS |