Experimental and numerical studies on nonlinear plasma series resonance effect in capacitively coupled radio frequency glow discharge plasma by homogeneous discharge model

Bora, B; Soto L.

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Título según SCOPUS: Experimental and numerical studies on nonlinear plasma series resonance effect in capacitively coupled radio frequency glow discharge plasma by homogeneous discharge model
Título de la Revista: ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle
Editorial: Institute of Electrical and Electronics Engineers Inc.
Fecha de publicación: 2015
Idioma: English
DOI:

10.1109/PLASMA.2014.7012147

Notas: SCOPUS