Experimental and numerical studies on nonlinear plasma series resonance effect in capacitively coupled radio frequency glow discharge plasma by homogeneous discharge model
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Título según SCOPUS: | Experimental and numerical studies on nonlinear plasma series resonance effect in capacitively coupled radio frequency glow discharge plasma by homogeneous discharge model |
Título de la Revista: | ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle |
Editorial: | Institute of Electrical and Electronics Engineers Inc. |
Fecha de publicación: | 2015 |
Idioma: | English |
DOI: |
10.1109/PLASMA.2014.7012147 |
Notas: | SCOPUS |