Abstract

This paper presents results on the formation of coatings in an atmospheric pressure dielectric barrier discharge using hexamethyldisiloxane (HMDSO) as gaseous precursor. Plasma-polymerized films are deposited onto polyethylene terephthalate (PET) films using argon and argon/air mixtures as carrier gases. The chemical and physical properties of the obtained coatings are discussed in detail using Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). FTIR and XPS results show that the composition of the gas phase and the chemical structure of the obtained coatings are clearly correlated. When pure argon is used as working gas, the film is polymeric with a structure close to [(CH(3))(2)-Si-O](n), which means that the deposited films resemble PDMS. However, if plasma-polymerization occurs in argon/air mixtures, the deposited film is silica-like containing only few carbon atoms. These dense SiO(x) coatings generally exhibit high barrier properties, while pure HMDSO-derived films might be of importance for selective permeation. From this point of view, the capability of controlling the film composition by varying the operation conditions opens interesting perspectives. (C) 2008 Elsevier B.V. All rights reserved.