Article SCOPUS
Proceedings of SPIE - The International Society for Optical Engineering  (2023)

Real-Time Warpage Deformation Monitoring Using Distributed Optical Fiber Sensing

Zhou, Yabin

Abstract

The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.

Más información

Título según SCOPUS: ID SCOPUS_ID:85159412950 Not found in local SCOPUS DB
Título de la Revista: Proceedings of SPIE - The International Society for Optical Engineering
Volumen: 12585
Fecha de publicación: 2023
DOI:

10.1117/12.2668453
Notas: SCOPUS