Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma
Más información
Título según WOS: | Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma |
Título según SCOPUS: | Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma |
Título de la Revista: | Physics of Plasmas |
Volumen: | 18 |
Número: | 10 |
Editorial: | American Institute of Physics Inc. |
Fecha de publicación: | 2011 |
Idioma: | English |
URL: | http://scitation.aip.org/content/aip/journal/pop/18/10/10.1063/1.3646317 |
DOI: |
10.1063/1.3646317 |
Notas: | ISI, SCOPUS |