Abstract

Barium titanate microstructures are fabricated on silicon(100)/platinum substrates coated with photoresist and titanium by a combination of hydrothermal and lift-off techniques. The microstructures of 10 ?m width are well defined. The barium titanate films grow in its cubic phase. Analysis by means of x-ray diffraction and scanning electron microscopy shows that only a part of the titanium layer is affected by the hydrothermal reaction. This limitation may be overcome by application of electrochemistry.