Hydrothermal preparation of Ba(Ti,Zr)O3 thin films from Ti-Zr metallic alloys on silicon substrate

Xia C.-T.; Fuenzalida, V.M.; Zarate R.A.

Keywords: films, growth, synthesis, silicon, barium, deposition, capacitance, alloys, film, measurement, thin, zirconium, titanium, hydrothermal, compounds, permittivity, Metallic, Sputter, zirconate


Ba(Ti,Zr)O3 thin films were grown hydrothermally on silicon substrates coated with sputtered a Ti-34 at.%Zr metallic alloy thin film. To ensure the formation of Ba(Ti,Zr)O3 under the hydrothermal conditions at 150°C, the concentration of the Ba(OH)2 had to be greater than 0.25 M. Preliminary capacitance measurement revealed a dielectric constant of 200 in Ba(Ti,Zr)O3 films of approximately 320 nm. The formation mechanism is discussed.

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Título de la Revista: Materials Research Society Symposium Proceedings
Volumen: 623
Editorial: Materials Research Society
Fecha de publicación: 2000
Página de inicio: 179
Página final: 184
URL: http://www.scopus.com/inward/record.url?eid=2-s2.0-0034448332&partnerID=q2rCbXpz