ConferencePaper
 (2010)

Micro-Selective Emitters

Ferrada, Pablo; Harney, Rudolf; Halm, Andreas; Mihailetchi, Valentin; Wefringhaus, Eckard; Weiss, Mathias; Lossen, Jan; Krokoszinski, H. J.

Keywords: contact formation, Diffusion Through Silicon Oxide, Spin-on Oxide